Otsuka Electronics
A Japanese maker of optical measurement instruments, including spectroscopic ellipsometers and film thickness monitors.
大塚電子・Equipment・Last updated: October 23, 2026
Overview
Otsuka Electronics makes the FE-5000 series spectroscopic ellipsometers, which measure film thickness from 0.1 nm to 1 µm with repeatability of 0.01% or less, and the FE-300F film thickness monitor, which measures 3 nm to 35 µm by optical interference.
Business: Film thickness measurement and ellipsometers
Why it matters
Optical film thickness measurement is used throughout front-end processing and in R&D of new films.
Main products
- •Spectroscopic ellipsometers (FE-5000 series)
- •Film thickness monitors (FE-300F)
Products (2)
- FE-300F film thickness monitor · Process monitors (EPD/OES)
- FE-5000 series · Ellipsometers