Japanese Semiconductor Inspection and Metrology Makers
Japanese makers of wafer and mask inspection, dimensional and film metrology, and the analytical instruments that fabs and labs use to find defects and check what was actually built.
- Companies13
- Equipment categories15
- Prefectures with sites4
Overview
Inspection finds defects, metrology measures dimensions, film thickness or resistivity, and analytical instruments identify what a defect or contaminant is made of. None of these tools changes the wafer, but they decide how quickly a fab can ramp yield.
Japanese companies supply mask inspection, CD-SEM and electron-beam tools, X-ray and optical metrology, and laboratory instruments such as spectrometers and surface analyzers.
Companies (13)
- LasertecEUV mask and mask blank inspection · HQ: Yokohama, Kanagawa · 29 product pages
- Hitachi High-TechCD-SEM metrology, defect inspection and etch systems · HQ: Minato, Tokyo · 16 product pages
- Hamamatsu PhotonicsFailure analysis, process monitoring and static elimination equipment · HQ: Hamamatsu, Shizuoka · 3 product pages
- JEOLElectron beam lithography systems, electron microscopes and surface analysis · 5 product pages
- Kobelco Research InstituteWafer metrology: flatness and carrier lifetime · 2 product pages
- NapsonResistivity and sheet resistance measurement · 2 product pages
- Otsuka ElectronicsFilm thickness measurement and ellipsometers · 2 product pages
- RigakuX-ray metrology and thermal analysis · 3 product pages
- ShimadzuAnalytical instruments · 4 product pages
- ULVAC-PHISurface analysis instruments (XPS, TOF-SIMS) · HQ: Chigasaki, Kanagawa · 2 product pages
- HolonPhotomask defect review, repair and CD-SEM metrology
- JASCOSpectroscopy instruments: FTIR, Raman and UV-visible · HQ: Hachioji, Tokyo · 1 product page
- TakanoWafer surface inspection systems · HQ: Miyada, Nagano
Equipment categories
Product categories where these companies are listed, with the number of companies from this page in each.
- Surface analysis instruments (XPS/SIMS) (4)
- CD-SEMs (3)
- Electron microscopes for observation (SEM/TEM) (3)
- Thermal analysis instruments (TG-DTA/DSC) (3)
- Wafer substrate inspection equipment (3)
- Mask inspection equipment (2)
- Organic analysis instruments (2)
- Crystal defect inspection equipment (1)
- Ellipsometers (1)
- Film thickness metrology (1)
- Ionizers (static elimination) (1)
- Macro inspection equipment (1)
- Mask dimension and flatness metrology (1)
- Power semiconductor manufacturing equipment (1)
- TSV formation equipment (1)
Related reading
Other equipment sectors: Wafer processing equipment · Wafer manufacturing equipment · Back-end and packaging equipment · Test and reliability equipment · Equipment components · Fab infrastructure
Japanese companies by sector
- Japanese semiconductor companies
- Japanese Wafer Manufacturing Equipment Makers
- Japanese Back-End and Packaging Equipment Makers
- Japanese Semiconductor Test Equipment Makers
- Japanese Semiconductor Equipment Component Suppliers
- Japanese Cleanroom and Fab Infrastructure Suppliers
- Japanese Wafer, Substrate and Photomask Suppliers
- Japanese Semiconductor Process Materials Suppliers
Japanese Semiconductor Inspection and Metrology Makers
Last updated: October 27, 2026