Kobelco Research Institute
A Japanese research and analysis company whose semiconductor products include wafer flatness measurement systems and carrier lifetime measurement systems.
コベルコ科研・Equipment・Last updated: October 23, 2026
Overview
Kobelco Research Institute makes the SBW series, which measures thickness, Bow/Warp and GBIR (TTV) of 300 mm wafers, and the LTA-2200EP/F, which measures carrier lifetime by the μ-PCD method on Si, SiC, GaN, LTPS and IGZO.
Business: Wafer metrology: flatness and carrier lifetime
Why it matters
Wafer flatness and lifetime measurements are used to qualify substrates before devices are built on them.
Main products
- •Wafer flatness and shape measurement (SBW series)
- •Carrier lifetime measurement (LTA-2200EP/F)
Products (2)
- LTA-2200EP/F · Carrier lifetime measurement
- SBW series flatness and shape measurement systems · Wafer substrate inspection equipment