Lasertec
A Yokohama-based maker of inspection and metrology systems, known for ACTIS, an actinic EUV mask inspection system that inspects masks with the same 13.5 nm wavelength used in EUV lithography.
レーザーテック・Equipment・Last updated: October 15, 2026
Overview
Lasertec was founded in 1960 and is headquartered in Shin-Yokohama, Yokohama. It is a fabless-style equipment maker focused on optical inspection and measurement.
EUV masks must be free of printable defects, and some defects are only visible at the exposure wavelength. Lasertec's lineup covers patterned EUV masks (ACTIS), mask blanks (MAGICS) and photomasks (MATRICS).
Business: EUV mask and mask blank inspection
Why it matters
EUV adoption at logic and DRAM makers drives demand for mask inspection, which ties Lasertec's business directly to EUV roadmaps.
Lasertec is a clear example of a small Japanese company holding a narrow but critical position in the global supply chain.
Main products
- •Actinic EUV patterned mask inspection (ACTIS series)
- •Mask blank inspection (MAGICS series)
- •Photomask inspection (MATRICS series)
Sites in Japan
Head officeHeadquarters
Yokohama, Kanagawa
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