Hamamatsu Photonics

A Hamamatsu-based photonics company whose semiconductor products include emission microscopes for failure analysis, plasma process monitors and soft X-ray ionizers.

浜松ホトニクス・Equipment・Last updated: October 23, 2026

Overview

Hamamatsu Photonics is headquartered in Hamamatsu, Shizuoka. Its PHEMOS-X emission microscope locates failures in semiconductor devices by capturing the faint light and heat generated at defects, with up to 2 cameras and up to 7 light sources for OBIRCH and other techniques.

It also makes the C10346-01 plasma process monitor, which detects plasma emission from 200 to 950 nm for endpoint detection in etching and cleaning, and the L12645 Photoionizer, which neutralizes static with soft X-rays without ozone or airflow.

Business: Failure analysis, process monitoring and static elimination equipment

Why it matters

Emission microscopy is a standard first step in locating faults inside a chip.
DISCO's stealth dicing builds on patents held by Hamamatsu Photonics, according to DISCO.

Main products

  • •Emission microscopes (PHEMOS-X)
  • •Plasma process monitors (C10346-01)
  • •Soft X-ray ionizers (Photoionizer L12645)

Sites in Japan

Head officeHeadquarters

Hamamatsu, Shizuoka

Products (3)

Related pages

Sources

  1. Hamamatsu Photonics: official website
  2. Hamamatsu Photonics: PHEMOS-X C15765-01 product page
  3. DISCO: DFL7341 product page
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