UX-1 series
USHIO's mask aligners that support the Deep UV band in addition to the i, h and g lines. They carry USHIO's own ultra-high-pressure UV lamps.
Maker: Ushio · Official product page
Specifications
| Exposure method | Mask aligner (full-field exposure) |
|---|---|
| Light source | Ultra-high-pressure UV lamp (i/h/g lines, Deep UV) |
| Resolution | L/S 1 µm (vacuum hard contact) |
| Sales status | Discontinued (manual tools offered as successors) |
| Main applications | Patterning for compound, power, MEMS and other devices |
Specifications as published by the maker. See the sources below.
Overview
The UX-1 series are USHIO's mask aligners (full-field exposure systems). They carry USHIO's own ultra-high-pressure UV lamps (500 W to 35 kW) and support the Deep UV band in addition to the i, h and g lines.
They resolve 1 µm line and space with vacuum hard contact exposure and 3 µm with proximity exposure at a 20 µm gap. Front-side alignment accuracy is ±1 µm and backside alignment ±1.5 µm.
They have been used for MEMS, crystal oscillators, SAW and BAW filters, RF devices, power semiconductors such as IGBTs and MOSFETs, LEDs and more. Production has now ended, and manual exposure tools are offered as successors.
Key features
- USHIO's own ultra-high-pressure UV lamps (i/h/g lines + Deep UV)
- L/S 1 µm with hard contact
- Alignment of ±1 µm front side and ±1.5 µm backside
- Discontinued product
Applications
- MEMS and sensors
- SAW/BAW filters and RF devices
- Power semiconductors and LEDs
Sources
Front-end equipment: more products
Last updated: October 23, 2026