Ushio
A Tokyo-based maker of industrial light sources, including lamps for lithography steppers, and of exposure systems for advanced packaging such as maskless direct-imaging tools.
ウシオ電機・Equipment・Last updated: October 22, 2026
Overview
Ushio was founded in 1964 and is headquartered in Chiyoda, Tokyo. Its semiconductor products include photolithography lamps, excimer lamps used for surface treatment and cleaning, and exposure systems.
For advanced packaging it offers the DE-2 maskless direct imaging system for 300 mm wafers and 600 mm panels, and projection aligners such as the UX-4, which pattern the fine wiring of fan-out and panel-level packages.
Business: Light sources and exposure systems for packaging
Why it matters
Panel-level packaging uses large rectangular panels instead of round wafers, which needs exposure tools designed for that format.
Ushio's lamps are consumables used in other companies' lithography tools.
Main products
- •Lamps for lithography steppers
- •Excimer lamps for surface treatment
- •Maskless direct imaging systems (DE-2)
- •Projection aligners for packaging (UX-4)
Sites in Japan
Head officeHeadquarters
Chiyoda, Tokyo
Products (1)
- UX-1 series · Mask aligners