Cryopumps
Marathon® CP
Cryopumps made by a US subsidiary of Sumitomo Heavy Industries, offered in sizes matched to semiconductor equipment.
Maker: Sumitomo Heavy Industries · Official product page
Specifications
| Diameter | 8 to 20 inch (8 sizes) |
|---|---|
| Key feature | Fast pumping of hydrogen and water vapor, oil-free |
| Main applications | Ultra-high vacuum pumping for semiconductor equipment |
Specifications as published by the maker. See the sources below.
Overview
Marathon CP is a cryopump made by a US subsidiary of Sumitomo Heavy Industries. It comes in 8 sizes from 8 to 20 inch to match semiconductor equipment.
It pumps hydrogen and water vapor quickly and is oil-free. It is used to create ultra-high vacuum in semiconductor equipment.
Key features
- Diameters of 8 to 20 inch (8 sizes)
- Fast pumping of hydrogen and water vapor
- Oil-free
Applications
- Ultra-high vacuum pumping for semiconductor equipment
Other cryopumps
- CRYO-U series · ULVAC Cryogenics
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026