Fab infrastructure

Ionizers (static elimination)

Ionizers neutralize static charge on wafers, glass, films and parts by supplying positive and negative ions, preventing electrostatic discharge damage and particle attraction.

What it does


Corona discharge ionizers blow ions onto the target, while soft X-ray ionizers ionize the air directly without airflow, ozone or particles and are used inside equipment.

Products (3)


Japanese makers in this category


Sources


  1. Hamamatsu Photonics: L12645 product page
  2. Hugle Electronics: ionizer product page
  3. Shishido Electrostatic: BF-X2ME product page

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Ionizers (static elimination)

Last updated: October 23, 2026