PC-300 plasma cleaner
A compact parallel-plate plasma cleaner that can switch between 2 processing modes, RIE and PE.
Maker: SAMCO · Official product page
Specifications
| Type | Parallel plate (RIE / PE switchable) |
|---|---|
| Recipes | Stores up to 100 recipes |
| Main applications | Cleaning and surface modification of BGAs, CSPs and lead frames |
Specifications as published by the maker. See the sources below.
Overview
PC-300 is SAMCO's parallel-plate plasma cleaner. It is designed for dry cleaning and surface modification of semiconductor packaging substrates, optical components and bio and medical products, and its compact size makes it easy to install anywhere.
It switches between 2 processing modes, RIE (reactive ion etching) and PE (plasma etching), simply by flipping the electrode shelf. Processing can be chosen according to substrate type, shape and purpose.
It supports automatic operation from a touch panel and storage of process recipes (up to 100 recipes), and has various interlocks and fault detection. Options include additional electrode shelves (up to 2 levels in RIE mode), quartz covers to prevent metal contamination and data logging.
Key features
- Switches between RIE and PE modes by flipping the electrode shelf
- Automatic operation from a touch panel and storage of up to 100 recipes
- Safe operation with interlocks and fault detection
Applications
- Cleaning and surface modification of plastic packages such as BGAs and CSPs, and lead frames
- Preventing silver oxidation in LED packages
- Ashing photoresist on wafers up to 8 inch
Sources
Last updated: October 23, 2026