Japan's Export Controls on Chipmaking Equipment
In 2023 Japan added 23 types of advanced semiconductor manufacturing equipment to its export controls, covering deposition, lithography, cleaning, etching, annealing and inspection tools. The rules took effect on July 23, 2023.
- Equipment types added23
- EffectiveJuly 23, 2023
What changed in 2023
Japan controls exports under its Foreign Exchange and Foreign Trade Act. On May 23, 2023, METI published an amendment that added high-performance semiconductor manufacturing equipment to the list of goods that need an export license, effective July 23, 2023. METI said the purpose was to prevent military diversion, complementing the Wassenaar Arrangement and taking into account the latest export control measures of other countries.
The controls also cover programs designed for the newly listed equipment and the technology needed to design or manufacture it.
Why it matters for Japanese suppliers
Deposition, lithography-related, cleaning and etching tools are the product lines of Japan's largest equipment makers, such as Tokyo Electron, SCREEN and Kokusai Electric. A license requirement does not ban exports, but shipments of the listed tools now need case-by-case approval.
For the steps where Japanese makers lead, see where Japanese equipment makers lead.
Sources
Last updated: October 22, 2026