Holon
A Japanese maker of electron-beam equipment for photomasks, including defect review SEMs, mask repair systems and CD-SEMs that measure pattern dimensions.
ホロン・Inspection and metrology・Last updated: October 27, 2026
Overview
Holon designs its own electron-beam optics and applies them to photomask quality control. Its review SEMs examine defects found by mask inspection, and its repair systems correct them.
It also makes CD-SEMs for measuring the critical dimensions of mask patterns.
Business: Photomask defect review, repair and CD-SEM metrology
Why it matters
- A defect found by mask inspection must be reviewed and then repaired or accepted before the mask goes to the fab, and Holon works at that step.
- Mask dimensions are printed onto every wafer exposed with that mask, so mask metrology sets a floor for wafer accuracy.
Main products
- •Mask defect review SEMs
- •Mask defect repair systems
- •CD-SEMs
Equipment categories
Categories where Holon is listed, with other Japanese makers and their products: