Inpria metal oxide EUV resists
Materials from Inpria in the US, which designs, develops and manufactures metal oxide photoresists for EUV. JSR made Inpria a wholly owned subsidiary in October 2021.
Maker: JSR · Official product page
Specifications
| Exposure wavelength | 13.5 nm (EUV) |
|---|---|
| Resist type | Metal oxide |
| Developer | Inpria (Oregon, US; JSR subsidiary) |
| Main applications | EUV patterning for advanced logic and DRAM |
Specifications as published by the maker. See the sources below.
Overview
Inpria's metal oxide EUV resists are photoresists for EUV (extreme ultraviolet) lithography developed by Inpria in Oregon, US. Inpria is a world leader in the design, development and manufacture of metal oxide photoresists for EUV.
JSR held 21% of Inpria's shares after taking part in funding rounds in 2017 and 2020, then acquired the remaining shares and made Inpria a wholly owned subsidiary on October 29, 2021. The acquisition price was US$514 million. Inpria keeps its name and its base in Oregon.
Unlike conventional organic chemically amplified resists, they are metal oxide materials and are positioned as expanding the options for patterning by EUV lithography.
Key features
- Metal oxide EUV resists
- Developed by a pioneer of metal oxide resists for EUV
- Wholly owned subsidiary of JSR since October 2021
Applications
- EUV patterning for advanced logic
- EUV patterning for DRAM
FAQ
When did Inpria become a JSR subsidiary?
The acquisition was completed on October 29, 2021, making Inpria a wholly owned subsidiary of JSR. The acquisition price was US$514 million.
Sources
Last updated: October 23, 2026