ACE SORTER
RORZE's sorter that performs high-throughput sorting with a servo-driven clean robot, aligner and linear axis. Load ports can be fitted at the front and back of the frame.
Maker: RORZE · Official product page
Specifications
| Wafer size | 200 mm / 300 mm |
|---|---|
| Configuration | Clean robot + aligner + linear travel axis |
| Main applications | Sorting and transferring wafers |
Specifications as published by the maker. See the sources below.
Overview
ACE SORTER is RORZE's high-throughput wafer sorter. It rearranges wafers between carriers and reads their IDs, handling 300 mm wafers (Φ300 ± 0.2 mm, 775 µm thick).
It supports 300 mm FOUP 25-slot (SEMI E47.1) and 300 mm FOSB 25-slot (SEMI M31) carriers. It has fast alignment with dual aligners, edge clamps that prevent particle transfer to the wafer backside, and ID reading on both sides of the wafer.
It can be integrated with OHT and stockers and is operated intuitively with a touch panel. An expandable frame structure allows future upgrades. Models by number of load ports are RSC132 (2 ports), RSC142 (3 ports) and RSC152 (4 ports), and options include wafer flipping, open cassettes, chemical filters, barcode/RF-ID readers, 200/300 mm dual use and ionizers.
Key features
- Fast alignment with dual aligners
- Edge clamps prevent particle transfer to the backside
- ID reading on both sides
- 2 to 4 load ports (RSC132/142/152)
Applications
- Sorting and ID management of 300 mm wafers
- Automated lines linked with OHT and stockers
More from RORZE
- RR493 series (vacuum SCARA arm) · Wafer handling robots
Sources
Factory automation: more products
Last updated: October 23, 2026