RORZE
A Japanese maker of wafer transfer robots, sorters and other handling systems used inside semiconductor equipment.
ローツェ・Equipment・Last updated: October 23, 2026
Overview
RORZE makes wafer handling automation. Its ACE SORTER sorts 300 mm wafers between carriers with dual aligners, edge clamps and ID reading on both sides, in versions with 2 to 4 load ports. The RR493 series is a vacuum SCARA robot driven by vacuum direct-drive motors, used in the transfer chambers of process tools.
Business: Wafer handling robots and sorters
Why it matters
Transfer robots and sorters are built into many front-end tools, so their reliability affects tool uptime.
Main products
- •Wafer sorters (ACE SORTER)
- •Vacuum wafer transfer robots (RR493 series)
Products (2)
- ACE SORTER · Wafer sorters
- RR493 series (vacuum SCARA arm) · Wafer handling robots