RR493 series (vacuum SCARA arm)

Specifications

Specifications as published by the maker. See the sources below.

Overview

The RR493 series is RORZE's vacuum SCARA arm robot (single arm). In the vacuum transfer chamber of semiconductor equipment, it moves wafers into and out of process chambers.

Its vacuum direct-drive motors (DDM) give high positional repeatability and reliable vacuum isolation. A link arm mechanism driven by steel belts allows a long end effector with a compact footprint.

The swing diameter is a small 530 mm, it handles gates as narrow as 15 mm, X and Y accuracy is ±0.1 mm, and it can rotate without limit. It supports ultra-high vacuum of 10⁻⁶ Pa and a He leak rate of 5×10⁻⁹. It handles wafers up to 300 mm, with a payload of 3.0 kg and Z-axis strokes of 70 mm and 140 mm.

Key features

• SCARA arm driven by vacuum DDM
• 530 mm swing diameter, handles 15 mm gates
• X and Y accuracy of ±0.1 mm, unlimited rotation
• Supports ultra-high vacuum of 10⁻⁶ Pa

Applications

• Wafer transfer in vacuum transfer chambers

Other wafer handling robots

• SEMISTAR-GEKKO VD31HDA-C · Yaskawa Electric

More from RORZE

• ACE SORTER · Wafer sorters

Sources

1. RORZE: RR493 product page

More on this topic