Murata Machinery (Muratec)
A Japanese machinery maker whose clean factory automation products include FOUP stockers and bare wafer stockers.
村田機械・Equipment・Last updated: October 23, 2026
Overview
Murata Machinery makes storage systems for cleanrooms. The CDS350-M3 clean stocker stores FOUPs with dual cranes and multi-port conveyor configurations, and the CDWX bare wafer stocker stores wafers taken out of FOUPs at about 60% less pitch, holding 1,725 to 4,325 wafers and up to 20,825.
Its lineup also includes the TW3 tower stocker for transport between floors, the OHB buffer placed under the overhead track and the TS300 buffer in front of tools.
Business: Stockers and fab automation
Why it matters
Automated storage and transport set how much work in progress a 300 mm fab can hold and move.
Main products
- •Clean stockers (CDS350-M3)
- •Bare wafer stockers (CDWX)
- •Tower stockers and overhead buffers
Products (2)
- CDS350-M3 clean stocker · Stockers
- CDWX bare wafer stocker · Stockers