VF-5700
A 300 mm vertical thermal processing system from JTEKT Thermo Systems (formerly Koyo Thermo Systems).
Maker: Koyo Thermo Systems (JTEKT Thermo Systems) · Official product page
Specifications
| Type | Batch vertical furnace (50 wafers) |
|---|---|
| Wafer size | 300 mm |
| Processes | Oxidation, diffusion, LP-CVD, annealing |
| Main applications | Heat treatment of Si devices |
Specifications as published by the maker. See the sources below.
Overview
VF-5700 is a mini-batch vertical furnace for 300 mm wafers from JTEKT Thermo Systems (formerly Koyo Thermo Systems). It processes up to 50 wafers per run, with the load selectable from 25 to 50 wafers.
It handles heat treatments such as oxidation, diffusion, LP-CVD and annealing. A high-power heater capable of fast ramp-up (LGO heater) raises throughput, and wafers are transferred quickly one at a time. The uniform heating length is 500 mm.
The main unit measures 1,100 (W) × 2,000 (D) × 2,950 (H) mm, kept to an easy-to-install size under 3,000 mm in height. Its design reduces stocker space, and it can also be installed without a stocker, lowering related costs. It has 2 I/O ports and an easy-to-use control system.
Key features
- 300 mm mini-batch (25 to 50 wafers selectable)
- High-power LGO heater for fast ramp-up, 500 mm uniform heating length
- Fast single-wafer transfer
- Under 3,000 mm in height, can be installed without a stocker
Applications
- Oxidation and diffusion
- LP-CVD and annealing
Other lpcvd equipment
- AdvancedAce®-II · Kokusai Electric
More from Koyo Thermo Systems (JTEKT Thermo Systems)
Sources
Front-end equipment: more products
Last updated: October 23, 2026