Koyo Thermo Systems (JTEKT Thermo Systems)
A JTEKT group maker of vertical furnaces for oxidation, diffusion, LP-CVD and high-temperature SiC processing, now operating as JTEKT Thermo Systems.
光洋サーモシステム・Equipment・Last updated: October 23, 2026
Overview
JTEKT Thermo Systems, formerly Koyo Thermo Systems, makes vertical batch furnaces. The VF-5700 is a 300 mm mini-batch furnace for oxidation, diffusion, LP-CVD and annealing that processes 25 to 50 wafers per run.
For SiC power devices, the VF-5300H runs high-temperature oxidation and oxynitridation at 700 to 1,400 °C on 150 to 200 mm wafers, and the VF-1000H is an R&D furnace that reaches 1,850 °C with a carbon heater.
Business: Vertical furnaces
Why it matters
Gate oxidation of SiC needs much higher temperatures than silicon, which calls for dedicated furnaces.
Main products
- •Vertical furnaces (VF-5700, VF-5300H, VF-1000H)