AdvancedAce®-II
KOKUSAI ELECTRIC's large-batch vertical thermal process system. Core technologies in temperature control, transfer and vacuum and gas replacement shorten cycle time.
Maker: Kokusai Electric · Official product page
Specifications
| Type | Large-batch vertical furnace |
|---|---|
| Wafer size | 300 mm |
| Processes | CVD, oxidation, diffusion, annealing |
| Main applications | Thermal CVD and heat treatment on volume production lines |
Specifications as published by the maker. See the sources below.
Overview
AdvancedAce-II is KOKUSAI ELECTRIC's large-batch thermal process system for 300 mm wafers. It brings together the company's core technologies in temperature control, automated transfer, vacuum and gas replacement, cooling and deposition, dramatically shortening cycle time for high throughput.
As a deposition system it is used to form CVD films and oxide films by LP-CVD, and as a treatment system for oxidation, diffusion and low- and high-temperature annealing. Lot capacity is up to 1.75 times that of KOKUSAI's earlier tool, the highest productivity in its large-batch line.
Its strengths are uniform film formation in deep trench structures and accurate, high-quality deposition at low temperature. A health check function is available as an option.
Key features
- Up to 1.75 times the lot capacity (vs. KOKUSAI's earlier tool)
- Uniform film formation in deep trench structures
- Accurate, high-quality deposition at low temperature
- Health check function (optional)
Applications
- Formation of CVD films and oxide films by LP-CVD
- Oxidation, diffusion and annealing
Other lpcvd equipment
- VF-5700 · Koyo Thermo Systems (JTEKT Thermo Systems)
More from Kokusai Electric
- Advanced TSURUGI · ALD equipment
- Advanced TSURUGI Plus-Ⅲ · ALD equipment
- MARORA® · Rapid thermal processing (RTP) equipment
- QUIXACE®-II · CVD equipment
- QUIXACE®-LV · Epitaxial growth equipment
- TANDUO · Rapid thermal processing (RTP) equipment
- TSURUGI-C²® · ALD equipment
- VERTEX Revolution · Oxidation furnaces
Sources
Front-end equipment: more products
Last updated: October 23, 2026