Mask cleaning and drying equipment
ARTS® (MC-150 series)
Shibaura Mechatronics' single-wafer photomask cleaning system that cleans photomasks with chemicals, UV and pure water. It can carry freeze cleaning.
Specifications
| Cleaning method | Hot chemicals, chemical megasonics, freeze cleaning (damage-free) |
|---|---|
| Supported masks | 6025 photomasks |
| Key feature | Metal-free construction |
| Main applications | Removal of tiny particles from photomasks |
Specifications as published by the maker. See the sources below.
Overview
ARTS is Shibaura Mechatronics' single-wafer photomask cleaning system. Together with the MC-150 series, it handles everything from next-generation EUV photomasks to legacy products.
It cleans masks with hot chemicals, chemical megasonics, UV and pure water, and can carry freeze cleaning, which does not damage the mask. It handles 6025-size photomasks and has a metal-free construction.
Key features
- Single-wafer photomask cleaning
- Can carry freeze cleaning (damage-free)
- Handles EUV masks through legacy products
Applications
- Removal of tiny particles from photomasks
- Cleaning EUV masks
More from Shibaura Mechatronics
- FOC300 series FOSB/FOUP cleaning systems · Carrier cleaning equipment
Sources
Front-end equipment: more products
Last updated: October 23, 2026