Shibaura Mechatronics
A Kanagawa-based equipment maker whose semiconductor products include photomask cleaning systems and FOUP/FOSB cleaning systems.
芝浦メカトロニクス・Equipment・Last updated: October 23, 2026
Overview
Shibaura Mechatronics is headquartered in Kanagawa Prefecture. Its ARTS single-wafer photomask cleaning system cleans masks with hot chemicals, megasonics, UV and pure water and can carry damage-free freeze cleaning, handling masks from EUV to legacy products.
Its FOC300 series cleans 300 mm FOUPs and FOSBs fully automatically, from disassembly through cleaning, reduced-pressure drying and reassembly.
Business: Photomask cleaning and carrier cleaning equipment
Why it matters
Mask cleaning must remove particles without damaging patterns, which becomes harder with EUV masks.
Main products
- •Photomask cleaning systems (ARTS, MC-150 series)
- •FOUP/FOSB cleaning systems (FOC300 series)
Sites in Japan
Head officeHeadquarters
Kanagawa
Products (2)
- ARTS® (MC-150 series) · Mask cleaning and drying equipment
- FOC300 series FOSB/FOUP cleaning systems · Carrier cleaning equipment