Wafer probers
UF3000EX-e
A fully automatic wafer prober from Tokyo Seimitsu (ACCRETECH). A newly developed XY stage drive and algorithms give high throughput.
Specifications
| Wafer size | 200 to 300 mm (including special wafers) |
|---|---|
| Type | Fully automatic wafer prober |
| Main functions | OTS (optical target scope), 15-inch touch panel |
| Main applications | Wafer test (probe test) |
Specifications as published by the maker. See the sources below.
Overview
UF3000EX-e is a fully automatic wafer prober from Tokyo Seimitsu (ACCRETECH). It is used in wafer test, where probe card needles are placed on chips on the wafer for electrical testing.
A newly developed XY stage drive and algorithms give high throughput. It handles 200 to 300 mm wafers, including special wafers, and has an optical target scope (OTS) and a 15-inch touch panel.
Key features
- Newly developed XY stage drive
- 200 to 300 mm (including special wafers)
- OTS and 15-inch touch panel
Applications
- Wafer test (probe test)
Other wafer probers
- HA1200 · Advantest
- Cellcia™ · Tokyo Electron (TEL)
- Precio octo™ · Tokyo Electron (TEL)
- Precio™ XL · Tokyo Electron (TEL)
- Prexa™ · Tokyo Electron (TEL)
- Prexa™ MS · Tokyo Electron (TEL)
- WDF™ 12DP+ · Tokyo Electron (TEL)
More from Tokyo Seimitsu (ACCRETECH)
- AD3000T-PLUS · Dicing saws
- ChaMP211 · Metal CMP equipment
- ChaMP332 · Oxide CMP equipment
- FTB/CCB series hub blades · Dicing blades and consumables
Sources
Last updated: October 23, 2026