Cellcia™
TEL's next-generation test platform with a stacked multi-cell structure, in which each cell independently tests a whole 300 mm wafer at once.
Specifications
| Wafer size | 300 mm |
|---|---|
| Number of cells | 12 or 25 |
| Main applications | Memory, wafer-level burn-in |
Specifications as published by the maker. See the sources below.
Overview
Cellcia is a next-generation full-wafer test platform for 300 mm wafers from Tokyo Electron (TEL). It has a stacked multi-cell structure, and each cell tests a wafer completely independently and at the same time, so lots are processed quickly.
In memory wafer test, massively parallel testing is widely used to cut cost, and technology for testing a 300 mm wafer in a single touchdown is established. Cellcia splits a lot across several cells to shorten processing time, and its stacked design greatly reduces footprint, sharply raising test efficiency per unit of floor area.
In addition to conventional prober technology, it brings in new stage, probe card, contactor and tester technology as well as know-how from TEL's front-end equipment. It comes with 12 or 25 cells and is used for memory and wafer-level burn-in.
Key features
- Stacked multi-cell structure
- Each cell tests independently and at the same time
- Greatly reduced footprint
- 12 or 25 cells
Applications
- Full-wafer test of memory
- Wafer-level burn-in
Other wafer probers
- HA1200 · Advantest
- Precio octo™ · Tokyo Electron (TEL)
- Precio™ XL · Tokyo Electron (TEL)
- Prexa™ · Tokyo Electron (TEL)
- Prexa™ MS · Tokyo Electron (TEL)
- WDF™ 12DP+ · Tokyo Electron (TEL)
- UF3000EX-e · Tokyo Seimitsu (ACCRETECH)
More from Tokyo Electron (TEL)
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- ANTARES™ · Dry cleaning equipment
- CELLESTA™-i · Single-wafer cleaning equipment
- CELLESTA™-i MD · Single-wafer cleaning equipment
- CELLESTA™ MS2 · Wafer scrubbers
- CELLESTA™ Pro SPM · Wet resist strip equipment
- CELLESTA™ SCD · Wafer dryers
- Certas LEAGA™ · Dry cleaning equipment
Sources
Last updated: October 23, 2026