Wafer probers
Precio octo™
TEL's wafer prober for 8-inch wafers, with very fast indexing and fast wafer exchange for higher productivity.
Specifications
| Wafer size | 150 / 200 mm |
|---|---|
| XY accuracy | ±2.0 µm |
| Options | TELPADS-I ultra-high-speed automatic probe mark inspection |
Specifications as published by the maker. See the sources below.
Overview
Precio octo is a wafer prober for 8-inch wafers from Tokyo Electron (TEL). To cut test cost and raise OEE (overall equipment efficiency), it uses very fast indexing and fast wafer exchange for a large gain in productivity.
A stiffer structure reduces vibration, and major improvements to key and optical components give highly stable operation.
With the optional TELPADS-I ultra-high-speed automatic probe mark inspection, it can judge probe card condition and assure probe mark quality.
Key features
- Very fast indexing
- Fast wafer exchange
- Low-vibration structure
- TELPADS-I (optional)
Applications
- Wafer test on 200 mm lines
Other wafer probers
- HA1200 · Advantest
- Cellcia™ · Tokyo Electron (TEL)
- Precio™ XL · Tokyo Electron (TEL)
- Prexa™ · Tokyo Electron (TEL)
- Prexa™ MS · Tokyo Electron (TEL)
- WDF™ 12DP+ · Tokyo Electron (TEL)
- UF3000EX-e · Tokyo Seimitsu (ACCRETECH)
More from Tokyo Electron (TEL)
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- ANTARES™ · Dry cleaning equipment
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- CELLESTA™-i MD · Single-wafer cleaning equipment
- CELLESTA™ MS2 · Wafer scrubbers
- CELLESTA™ Pro SPM · Wet resist strip equipment
- CELLESTA™ SCD · Wafer dryers
- Certas LEAGA™ · Dry cleaning equipment
Sources
Last updated: October 23, 2026