Prexa™ MS
TEL's fully automatic 300 mm prober for memory wafer test. It supports probing loads up to 1,000 kg and heat absorption control for high heat generation.
Specifications
| Wafer size | 300 mm (200 mm optional) |
|---|---|
| XY accuracy | ±0.8 µm |
| Probing load | 600 kg (1,000 kg optional) |
Specifications as published by the maker. See the sources below.
Overview
Prexa MS is a fully automatic wafer prober for 300 mm wafers from Tokyo Electron (TEL). On top of Prexa's advanced functions, it adds the functions needed for memory wafer test.
Test pin counts and heat generation keep rising in memory, especially advanced DRAM. Prexa MS supports very high probing loads of up to 1,000 kg as an option, and controls the high load for accurate contact.
Heat absorption control for high heat generation enables full-wafer test (single-touchdown contact) for future memory. XY probing accuracy is ±0.8 µm.
Key features
- High probing load up to 1,000 kg
- Heat absorption control for high heat generation
- XY accuracy of ±0.8 µm
Applications
- Wafer test of DRAM and other memory
- Full-wafer single-touchdown contact
Other wafer probers
- HA1200 · Advantest
- Cellcia™ · Tokyo Electron (TEL)
- Precio octo™ · Tokyo Electron (TEL)
- Precio™ XL · Tokyo Electron (TEL)
- Prexa™ · Tokyo Electron (TEL)
- WDF™ 12DP+ · Tokyo Electron (TEL)
- UF3000EX-e · Tokyo Seimitsu (ACCRETECH)
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Sources
Last updated: October 23, 2026