Prexa™
TEL's next-generation fully automatic 300 mm wafer prober that builds on Precio technology, with fewer error assists and more automation.
Specifications
| Wafer size | 300 mm (200 mm optional) |
|---|---|
| XY accuracy | ±1.8 µm (±1.5 µm with the 200 mm option) |
| Probing load | 300 kg (450 kg optional) |
Specifications as published by the maker. See the sources below.
Overview
Prexa is a next-generation fully automatic wafer prober for 300 mm wafers, developed by Tokyo Electron (TEL) on a new platform.
Beyond scaling, 3D stacking and advanced packages that combine several different devices are spreading, which makes securing KGD (known good die) in wafer test more important. Prexa inherits many technologies from the Precio series while reducing error assists and adding automation functions for even higher productivity.
State-of-the-art optics and new algorithms give highly accurate contact and automate operations such as setup. It can also inspect probe card tips and probe marks at high speed. It uses a linear motor stage.
Key features
- State-of-the-art optics and new algorithms
- Automated operation
- High-speed inspection of probe tips and probe marks
- Linear motor stage
Applications
- Wafer test (securing KGD)
- Test for advanced packaging
Other wafer probers
- HA1200 · Advantest
- Cellcia™ · Tokyo Electron (TEL)
- Precio octo™ · Tokyo Electron (TEL)
- Precio™ XL · Tokyo Electron (TEL)
- Prexa™ MS · Tokyo Electron (TEL)
- WDF™ 12DP+ · Tokyo Electron (TEL)
- UF3000EX-e · Tokyo Seimitsu (ACCRETECH)
More from Tokyo Electron (TEL)
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- ANTARES™ · Dry cleaning equipment
- CELLESTA™-i · Single-wafer cleaning equipment
- CELLESTA™-i MD · Single-wafer cleaning equipment
- CELLESTA™ MS2 · Wafer scrubbers
- CELLESTA™ Pro SPM · Wet resist strip equipment
- CELLESTA™ SCD · Wafer dryers
- Certas LEAGA™ · Dry cleaning equipment
Sources
Last updated: October 23, 2026