Precio™ XL
Tokyo Electron's fully automatic 200/300 mm wafer prober driven by linear motors. It offers high-speed probe mark inspection and automatic probe card leveling.
Specifications
| Wafer size | 200 / 300 mm |
|---|---|
| Type | Fully automatic wafer prober (linear motor) |
| Accuracy | XY ±1.8 µm, Z ±5.0 µm |
| Main functions | TELPADS-I (high-speed probe mark inspection), Auto Leveling, CoSMOz |
Specifications as published by the maker. See the sources below.
Overview
Precio XL is a fully automatic wafer prober for 200 mm and 300 mm wafers from Tokyo Electron. In wafer test (probe test), it brings the needles of a probe card into contact with the pads of each chip on the wafer and connects them electrically to the tester.
Linear motors give high productivity, better contact performance, improved cleanliness and short delivery times. XY accuracy is ±1.8 µm and Z accuracy is ±5.0 µm, and it supports probing loads of 200 kg, or 300 kg as an option.
It has TELPADS-I high-speed probe mark inspection, Auto Leveling that adjusts probe card parallelism automatically, a range of Z-axis control functions and CoSMOz software that calculates the best contact sequence, while keeping parameter compatibility. The series also includes Precio octo for 8-inch wafers and the PN-300 prober network system.
Key features
- Fully automatic 200/300 mm prober with linear motors
- XY ±1.8 µm, Z ±5.0 µm
- TELPADS-I (high-speed probe mark inspection) and Auto Leveling
- Optimized contact sequence with CoSMOz
Applications
- Wafer test (probe test of logic and memory)
Other wafer probers
- HA1200 · Advantest
- Cellcia™ · Tokyo Electron (TEL)
- Precio octo™ · Tokyo Electron (TEL)
- Prexa™ · Tokyo Electron (TEL)
- Prexa™ MS · Tokyo Electron (TEL)
- WDF™ 12DP+ · Tokyo Electron (TEL)
- UF3000EX-e · Tokyo Seimitsu (ACCRETECH)
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Sources
Last updated: October 23, 2026