Stockers
Clean Stocker CLS-50
An automated cleanroom storage system for 300 mm fabs. Combined with the Cleanway overhead transport system, it temporarily stores FOUPs waiting for the next process.
Maker: Daifuku · Official product page
Specifications
| Stored items | FOUPs (300 mm) |
|---|---|
| Configuration | Modular design (expandable horizontally) |
| Related models | CLS-40 (for 200 mm) / Clean Mini Stocker / ZFS (space-saving storage beside and under the track) |
| Main applications | Temporary FOUP storage between front-end processes |
Specifications as published by the maker. See the sources below.
Overview
Clean Stocker CLS-50 is Daifuku's automated cleanroom storage system for 300 mm fabs. It temporarily stores FOUPs (containers that hold wafers) waiting for the next process.
It is used together with the Cleanway overhead transport system. Its modular design can be expanded horizontally. There are also CLS-40 for 200 mm, the compact Clean Mini Stocker, and ZFS, which provides space-saving storage beside and under the overhead transport track.
Key features
- Automated storage for 300 mm FOUPs
- Modular design expandable horizontally
- Works with the Cleanway overhead transport system
Applications
- Temporary FOUP storage between front-end processes
Other stockers
- CDS350-M3 clean stocker · Murata Machinery (Muratec)
- CDWX bare wafer stocker · Murata Machinery (Muratec)
Sources
Last updated: October 23, 2026