Stockers
Stockers are automated storage systems in the fab that hold FOUPs or bare wafers between process steps. Robots or cranes move carriers in and out, linked to the overhead transport system.
What it does
Storage density, transfer speed and cleanliness matter because a 300 mm fab keeps large amounts of work in progress waiting for the next tool.
Products (3)
- Clean Stocker CLS-50 · Daifuku
An automated cleanroom storage system for 300 mm fabs. Combined with the Cleanway overhead transport system, it temporarily stores FOUPs waiting for the next process.
- CDS350-M3 clean stocker · Murata Machinery (Muratec)
Murata Machinery's clean stocker for storing carriers. It supports dual cranes and complex port configurations with conveyors.
- CDWX bare wafer stocker · Murata Machinery (Muratec)
A bare wafer stocker that takes wafers out of FOUPs and stores them in dedicated cells. With about 60% less pitch than FOUP storage, it stores wafers at high density.
Japanese makers in this category
- Daifuku · 1 product(s) listed
- Murata Machinery (Muratec) · 2 product(s) listed
Sources
Related calculators
Last updated: October 23, 2026