LabRAM Odyssey Semiconductor
A Raman microscope for photoluminescence and Raman imaging of wafers up to 300 mm.
Maker: HORIBA · Official product page
Specifications
| Analysis technique | Raman microspectroscopy, photoluminescence |
|---|---|
| Key feature | Measurement wavelength 200 to 2,100 nm, spatial resolution under 0.5 µm, 300 × 300 mm motorized stage |
| Main applications | Identifying defects and non-uniformity on wafers |
Specifications as published by the maker. See the sources below.
Overview
LabRAM Odyssey Semiconductor is HORIBA's Raman and photoluminescence (PL) imaging system for wafers. It is a true confocal microscope for Raman and PL imaging of wafers up to 300 mm in diameter, with automated sample handling and objective positioning.
Holders for 4, 6, 8 and 12-inch wafers are positioned precisely by a 300 × 300 mm motorized XY stage. Autofocus with tilt correction compensates for wafer warpage and sag. DuoScan technology switches between fast macro-spot scanning of the whole wafer and sub-micron step scanning for defect inspection.
PL and Raman signals can be measured simultaneously in one spectrum, and the wavelength range covers 200 to 2,200 nm without changing optics. ParticleFinder PF3 automatically detects and chemically identifies contamination across the whole wafer. It is used for uniformity evaluation, defect inspection, 2D materials such as graphene and transition metal dichalcogenides, group IV semiconductors in advanced FinFETs and nanosheets, and III-V, III-N and SiC compound semiconductors.
Key features
- Raman and PL imaging of 300 mm wafers (true confocal)
- Full-wafer scanning and defect inspection with DuoScan
- Simultaneous PL and Raman measurement, 200 to 2,200 nm
- Automatic contamination detection with ParticleFinder PF3
Applications
- Uniformity evaluation and defect inspection of wafers
- Evaluation of 2D materials, compound semiconductors and nanosheets
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Sources
Organic analysis instruments
Last updated: October 23, 2026