CRITERION D500
HORIBA STEC's pressure-based mass flow control module that measures flow by detecting differential pressure in the laminar flow region. It uses a piezo-actuated metal diaphragm valve.
Maker: HORIBA · Official product page
Specifications
| Measurement method | Pressure-based (laminar flow differential pressure detection) |
|---|---|
| Accuracy and response | ±1% S.P., response 0.8 seconds |
| Key feature | PI function, multi-gas and multi-range, self-diagnosis |
| Main applications | Gas flow control in advanced processes |
Specifications as published by the maker. See the sources below.
Overview
CRITERION D500 is HORIBA STEC's pressure-based mass flow module. It measures flow by detecting differential pressure in the laminar flow region and controls it with a piezo-actuated metal diaphragm valve.
Flow is hardly affected by fluctuations in supply pressure, and one unit handles several gas types, ranges and pressures. The control range is 0.2 to 100% F.S., response is under 0.8 seconds and the construction is all-metal.
It has a self-diagnosis function called G-LIFE and is used for gas flow control in advanced semiconductor manufacturing processes.
Key features
- Pressure-based (laminar flow differential pressure detection)
- Control range of 0.2 to 100% F.S., response under 0.8 seconds
- Multi-gas and multi-range
- G-LIFE self-diagnosis
Applications
- Gas flow control in advanced processes
Other mass flow controllers (mfc)
- FCS®-P8500 · Fujikin
More from HORIBA
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Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026