Polishing pads and carrier parts
Suba™ series
Polishing pads made of polyester nonwoven fabric impregnated with polyurethane. They were developed for primary and secondary polishing of silicon wafers.
Maker: Nitta DuPont · Official product page
Specifications
| Types | Polishing pad (impregnated nonwoven) |
|---|---|
| Related products | For edge polishing |
| Main applications | Primary and secondary polishing of silicon wafers |
Specifications as published by the maker. See the sources below.
Overview
The Suba series are Nitta DuPont's polishing pads. They are made by impregnating polyester nonwoven fabric with polyurethane.
They were developed for primary and secondary polishing of silicon wafers. There are also grades for edge polishing.
Key features
- Impregnated nonwoven polishing pads
- Grades for edge polishing also available
Applications
- Primary and secondary polishing of silicon wafers
Other polishing pads and carrier parts
- GLANZOX · Fujimi Incorporated
- IC1000™ series · Nitta DuPont
Sources
Polishing pads and carrier parts
Last updated: October 23, 2026