CIMVision-semi
Yokogawa Electric's MES package that implements manufacturing management and process control for semiconductor fabs.
Maker: Yokogawa Electric · Official product page
Specifications
| Availability | MES package |
|---|---|
| Target fabs | Semiconductor fabs |
| Key feature | Can be combined with equipment online connection (CELLBrain) |
| Main applications | Manufacturing management, process control |
Specifications as published by the maker. See the sources below.
Overview
CIMVision-semi is Yokogawa Electric's MES (manufacturing execution system) package for semiconductor fabs. It handles manufacturing management and process control in advanced 300 mm wafer production environments.
It flexibly covers everything from manual process tracking to fully automated production lines, and Yokogawa actively takes part in SEMI standardization. It runs on UNIX, Linux or Windows, and its database design is open, making it easy to link with existing systems.
It targets 300 mm and 200 mm volume lines as well as ASIC lines and research pilot lines, from high-mix low-volume to mass production, and has been installed at 20 fabs of 14 companies. It integrates subsystems such as process control, SPC, recipe management, online equipment connection and inline lithography process monitoring, helping reduce cost, improve tool efficiency and quality, ensure traceability and shorten manufacturing time.
Key features
- Covers manual through fully automated lines
- Runs on UNIX, Linux and Windows; open database design
- Process control, SPC, recipe management and online equipment connection
- Installed at 20 fabs of 14 companies
Applications
- Manufacturing execution management in 300 mm and 200 mm fabs
- ASIC lines and research pilot lines
More from Yokogawa Electric
Sources
Factory automation: more products
Last updated: October 23, 2026