EQBrain

Specifications

Specifications as published by the maker. See the sources below.

Overview

EQBrain is Yokogawa Electric's communication solution for semiconductor equipment. It lets equipment and host systems (MES) exchange data using the industry-standard SECS/HSMS/GEM/GEM300 protocols, connecting equipment and MES in real time.

SECS is a serial equipment communication standard; HSMS is high-speed TCP/IP-based messaging that replaces RS232C serial connections; GEM is the higher-level protocol for 200 mm lines; and GEM300 is the higher-level protocol for 300 mm production environments. A configuration tool lets users define parameters without extensive programming.

With a 30-year track record, it is used in more than 600 equipment models from more than 150 companies. It supports front-end equipment such as deposition, etching and lithography, back-end equipment such as bonding and assembly, and equipment for FPDs and electronic components. Products include EQBrain V4 for 200 mm and smaller, EQBrain 300 for 300 mm, the basic EQBrain-Lite, the BrainARTEST300 communication test simulator and an SECS-HSMS gateway for existing equipment.

Key features

• Supports SECS/HSMS/GEM/GEM300
• Configuration tool minimizes programming
• 30 years, more than 150 companies and more than 600 equipment models
• EQBrain V4/300/Lite and a test simulator

Applications

• Host (MES) connection for semiconductor equipment
• SECS/HSMS conversion for existing equipment

Other equipment interfaces (secs/gem)

• QuickOnline · Toshiba Electronic Devices & Storage

More from Yokogawa Electric

• CELLBrain · Equipment engineering systems (EES)
• CIMVision-semi · Manufacturing execution systems (MES)

Sources

1. Yokogawa Electric: EQBrain product page

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