Exhaust gas abatement systems
TND-Single (including TND-Single Plus)
Ebara's exhaust gas abatement system that combines combustion and wet scrubbing. Launched in 2019.
Maker: Ebara · Official product page
Specifications
| Processing method | Combustion + wet scrubbing (Plus: wet + combustion + wet) |
|---|---|
| Series | TND / GCR (catalytic, PFC) / GT (dry) / G6-E (high-flow hydrogen and chlorine) |
| Main applications | Abatement of hazardous gases from semiconductor manufacturing |
Specifications as published by the maker. See the sources below.
Overview
TND-Single is Ebara's exhaust gas treatment (abatement) system. It combines combustion and wet scrubbing to make hazardous gases from semiconductor manufacturing harmless. It was launched in 2019.
TND-Single Plus treats gases in 3 stages: wet scrubbing, combustion and wet scrubbing. Ebara also offers the GCR, which decomposes PFCs catalytically, the dry GT, and the G6-E for high flows of hydrogen and chlorine.
Key features
- Combustion + wet scrubbing
- Plus model: wet + combustion + wet
- Launched in 2019
Applications
- Abatement of hazardous gases from semiconductor manufacturing
Other exhaust gas abatement systems
- KT1000 series · Kanken Techno
More from Ebara
- EV-M series · Vacuum pumps
- F-REX300X · Metal CMP equipment
- F-REX300XA · Oxide CMP equipment
- UFP600AS · TSV formation equipment
Sources
Last updated: October 23, 2026