ULVAC Cryogenics
A ULVAC group company in Chigasaki, Kanagawa that makes cryopumps for high-vacuum process equipment.
アルバック・クライオ・Equipment・Last updated: October 23, 2026
Overview
ULVAC Cryogenics is headquartered in Chigasaki, Kanagawa. Its CRYO-U series cryopumps, developed from ULVAC's vacuum technology and CTI's cryogenic technology, come in 4 to 30-inch sizes, pump all gases and need no liquid nitrogen. They are used in sputtering, ion implantation and evaporation tools.
Business: Cryopumps
Why it matters
Cryopumps create the clean high vacuum that PVD and ion implantation need.
Main products
- •Cryopumps (CRYO-U series)
Sites in Japan
Head officeHeadquarters
Chigasaki, Kanagawa
Products (1)
- CRYO-U series · Cryopumps