Yaskawa Electric
A Kitakyushu-based maker of motion control and robotics whose semiconductor products include vacuum and atmospheric wafer transfer robots.
安川電機・Equipment・Last updated: October 23, 2026
Overview
Yaskawa Electric is headquartered in Kitakyushu, Fukuoka. Its SEMISTAR-GEKKO VD31HDA-C is a vacuum wafer transfer robot with vacuum direct-drive motors and steel belts, dual arms that shorten wafer swaps and position repeatability of 0.05 mm, for wafers up to 300 mm. SEMISTAR-GEKKO MD124D is its atmospheric counterpart.
Business: Wafer transfer robots
Why it matters
Wafer transfer robots are built into deposition and etch tools, where speed and low contamination both matter.
Main products
- •Vacuum wafer transfer robots (SEMISTAR-GEKKO VD31HDA-C)
- •Atmospheric wafer transfer robots (SEMISTAR-GEKKO MD124D)
Sites in Japan
Head officeHeadquarters
Kitakyushu, Fukuoka
Products (1)
- SEMISTAR-GEKKO VD31HDA-C · Wafer handling robots