Chemical pumps (bellows pumps)
FS-H series air-driven bellows pumps
A bellows pump dedicated to semiconductor processes, with all wetted parts in fluoropolymer and a fluoropolymer-coated exterior.
Maker: IWAKI · Official product page
Specifications
| Type | Air-driven bellows (wetted parts in fluoropolymer) |
|---|---|
| Liquid temperature and pressure | 5 to 180 °C, discharge pressure up to 0.45 MPa |
| Main applications | Wafer cleaning, CMP, chemical supply |
Specifications as published by the maker. See the sources below.
Overview
The FS-H series are IWAKI's air-driven bellows pumps. All parts in contact with liquid are fluoropolymer, and the exterior is also fluoropolymer-coated, making them dedicated to semiconductor processes.
They handle liquid temperatures of 5 to 180 °C, with a maximum discharge pressure of 0.45 MPa. They are used for wafer cleaning, CMP and chemical supply.
Key features
- All wetted parts in fluoropolymer
- Liquid temperature of 5 to 180 °C
- Discharge pressure up to 0.45 MPa
Applications
- Wafer cleaning
- CMP
- Chemical supply
Other chemical pumps (bellows pumps)
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026