O-rings and seals
VALQUA ARMOR
High-purity rubber seals developed by VALQUA for dry process equipment. They generate few particles and contain no metals.
Maker: VALQUA · Official product page
Specifications
| Material | High-purity rubber (VALQUA's own rubber modification) |
|---|---|
| Key feature | Low gas permeation, low outgassing, metal-free |
| Main applications | Dry etching, CVD and ashing equipment |
Specifications as published by the maker. See the sources below.
Overview
VALQUA ARMOR is a high-purity rubber seal that VALQUA developed for dry process equipment. It is made with VALQUA's own rubber modification technology.
It generates few particles and contains no metals. Low gas permeation and low outgassing make it suitable for dry etching, CVD and ashing equipment.
Key features
- Low particles, metal-free
- Low gas permeation, low outgassing
Applications
- Seals for dry etching, CVD and ashing equipment
Also listed under: Consumable parts and parts cleaning
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026