U-Probe
Micronics Japan's probe card that uses its own MEMS micro-cantilevers to test a whole wafer in one touchdown.
Maker: Micronics Japan · Official product page
Specifications
| Probe type | MEMS micro-cantilever |
|---|---|
| Target devices | Memory (12-inch full wafer, about 2,500 DUTs) |
| Related products | MEMS-SP / MEMS-V |
| Main applications | Wafer test of memory |
Specifications as published by the maker. See the sources below.
Overview
U-Probe is Micronics Japan's probe card for memory. It combines micro-cantilever MEMS probes developed with the company's own MEMS technology with manufacturing technology for thin-film multilayer wiring substrates.
It is designed to test many DRAM and flash memory dies on 12-inch wafers at once. One card covers about 2,500 DUTs with about 200,000 pins, and a 12-inch wafer can be tested in a single touchdown.
It has an efficient device layout that makes the most of tester resources and optimal connectivity for higher yield. There is also a light, low-cost PCB-less version in which the thin-film multilayer substrate with MEMS probes docks directly to the tester without a printed circuit board.
Key features
- MEMS micro-cantilever probes
- About 2,500 DUTs and about 200,000 pins
- Tests a 12-inch wafer in one touchdown
- PCB-less version (light, low cost)
Applications
- Wafer test of DRAM and flash memory
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026