300mm FOUP
Miraial's in-process container for 300 mm wafers, built for long-term use with high dimensional accuracy and carefully selected materials.
Maker: Miraial · Official product page
Specifications
| Types | FOUP (in-process container) |
|---|---|
| Wafer size | 300 mm |
| Related products | 300mm FOSB (shipping container) |
| Main applications | Wafer transport and storage in fabs |
Specifications as published by the maker. See the sources below.
Overview
Miraial's 300mm FOUP (model KT-3003MIR) is a container for transporting 300 mm wafers between processes. It complies with SEMI M31, E1.9, E47.1, E15.1, E57 and E62.
It is made of polycarbonate with conductive materials (E7 to E10). It holds 26 wafers, used as 25 wafers and 1 dummy.
A double gasket structure keeps particles from entering from outside, and round latches minimize the opening area to prevent particles from scattering out of the inside of the lid. Its environmentally conscious design lets only the needed parts be replaced.
Key features
- Complies with SEMI M31, E47.1 and other standards
- Double gasket prevents particle entry
- Round latches prevent particles scattering from inside the lid
- Environmentally conscious design with replaceable parts
Applications
- In-process wafer transport in 300 mm fabs
Other wafer carriers, foups and efems
- FOUP300EX · Shin-Etsu Polymer
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026