Fluid and gas components (fittings and tubing)
NRD series high-pressure diaphragm valves
KITZ SCT's diaphragm valve for high-purity gases, with a springless diaphragm structure that limits particles.
Maker: KITZ SCT · Official product page
Specifications
| Types | Diaphragm valve for high-purity gases |
|---|---|
| Key feature | Rated for high pressure of 20.6 MPa, springless structure |
| Related models | VRD (high pressure) / VLD (general purpose) / KCD (compact) |
| Main applications | High-pressure gas lines in semiconductor processes |
Specifications as published by the maker. See the sources below.
Overview
The NRD series are KITZ SCT's diaphragm valves for high-purity gases. A springless diaphragm structure without springs limits particle generation.
They handle high pressures of 20.6 MPa and are used in high-pressure gas lines in semiconductor processes. KITZ SCT also offers the VRD for high pressure, the general-purpose VLD and the compact KCD.
Key features
- Springless diaphragm structure
- Rated for high pressure of 20.6 MPa
Applications
- High-pressure gas lines in semiconductor processes
Other fluid and gas components (fittings and tubing)
- IGS® integrated gas system · Fujikin
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026