NeoDry G series
An air-cooled dry vacuum pump that is durable, compact, low-vibration and quiet. Periodic maintenance is needed once every 6 years.
Specifications
| Type | Air-cooled dry vacuum pump |
|---|---|
| Key feature | Quieter and better water vapor handling than NeoDry-E |
| Series | NeoDry-E (7E to 300E) / NeoDry-G |
| Main applications | Vacuum pumping for semiconductors, electronic components and others |
Specifications as published by the maker. See the sources below.
Overview
The NeoDry G series are Kashiyama Industries' scroll dry vacuum pumps. They are designed so that tip seals need no replacement, with no performance degradation or wear particles, and no oil mist or contamination of vacuum chambers.
Pumping speeds are 110 L/min for NeoDry7G, 250 L/min for 15G, 500 L/min for 30G and 600 L/min for 36G. Ultimate pressure is 0.7 to 5.0 Pa without the gas ballast.
Maintenance is needed only once every 3 years, and they can pump condensable gases such as water vapor and solvents. An inverter supports both 50 and 60 Hz, and they are light and compact, with low noise and vibration suited to research facilities. The gas ballast is optional. They are used to replace scroll pumps and oil-sealed rotary pumps.
Key features
- Scroll type with no tip seal replacement
- Pumping speeds of 110 to 600 L/min
- Maintenance once every 3 years
- Handles condensable gases, low noise and vibration
Applications
- Vacuum equipment in research facilities
- Replacement of scroll and oil-sealed rotary pumps
Other vacuum pumps
- EV-M series · Ebara
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026