RT-3000 / RG-2000
Napson's semi-automatic instruments that measure resistivity and sheet resistance over a wide range by the four-point probe method.
Maker: Napson · Official product page
Specifications
| Measurement method | Four-point probe (contact, semi-automatic) |
|---|---|
| Wafer size | Up to 8 inch (up to 12 inch for RG-3000) |
| Measurement range | Sheet resistance 1 mΩ/sq to 10 MΩ/sq (RT-3000(S)) |
| Main applications | Resistivity maps of Si, poly-Si, SiC and new materials |
Specifications as published by the maker. See the sources below.
Overview
RT-3000/RG-2000 are Napson's semi-automatic instruments for measuring resistivity and sheet resistance by the 4-point probe method. Napson says they have the widest measurement range in the world for 4-point probe instruments.
The measurement range of RT-3000(S) is 100 µ to 1 MΩ·cm in resistivity and 1 m to 10 MΩ/sq in sheet resistance, and RT-3000(H) covers sheet resistance of 10 m to 1 GΩ/sq. Supported samples are up to 8 inch or 156 × 156 mm on RT-3000/RG-2000, and up to 12 inch or 210 × 210 mm on the large-diameter RG-3000.
They have programmable measurement patterns, round and square mapping software and a self-test function, plus thickness, edge position and temperature correction for silicon. Besides semiconductors, they are used to evaluate solar cell materials, new materials such as carbon nanotubes and graphene, conductive thin films, epitaxial layers and ion-implanted samples.
Key features
- Four-point probe method with one of the widest measurement ranges in the world
- Up to 8 inch (12 inch for RG-3000)
- Round and square mapping, thickness and temperature correction
Applications
- Resistivity evaluation of silicon wafers, epitaxial layers and implanted layers
- Evaluation of conductive thin films and new materials
Other sheet resistance measurement
- VR300DH3 · Kokusai Electric
More from Napson
- NC-80MAP · Wafer substrate inspection equipment
Sources
Front-end equipment: more products
Last updated: October 23, 2026