NC-80MAP
A resistivity and sheet resistance instrument using the eddy current method, with multiple non-contact probes covering a wide range. It can take maps of up to 217 points.
Maker: Napson · Official product page
Specifications
| Measurement method | Non-contact (eddy current method) |
|---|---|
| Measurements | Resistivity and sheet resistance (2D/3D maps) |
| Target processes | Si, SiC and GaN wafers |
| Main applications | Resistivity inspection of substrates |
Specifications as published by the maker. See the sources below.
Overview
NC-80MAP is Napson's semi-automatic instrument for measuring resistivity and sheet resistance without contact (eddy current method). Because it measures without touching the sample, it can measure precisely without causing damage.
It handles 2 to 8-inch wafers as standard and 12-inch wafers as an option. Across several probe types combined, the measurement range is 1 mΩ to 200 Ω·cm in resistivity and 10 mΩ/sq to 3 kΩ/sq in sheet resistance. 4 probe configurations allow measurement in steps.
Multi-point measurement is possible from 8 mm or more inside the edge, measurement patterns can be programmed, and 2D/3D mapping software visualizes the results. The number and type of probes installed can be changed on request.
Key features
- Non-contact measurement by the eddy current method
- 2 to 8 inch (12 inch optional)
- Resistivity 1 mΩ to 200 Ω·cm, sheet resistance 10 mΩ to 3 kΩ/sq
- Multi-point measurement and 2D/3D mapping
Applications
- Resistivity evaluation of silicon wafers and substrates
- Sheet resistance control of conductive films
Other wafer substrate inspection equipment
- SBW series flatness and shape measurement systems · Kobelco Research Institute
- MAGICS M5640 · Lasertec
All wafer substrate inspection equipment and Japanese suppliers
More from Napson
- RT-3000 / RG-2000 · Sheet resistance measurement
Sources
Wafer substrate inspection equipment
Last updated: October 23, 2026