VR300DH3

Specifications

Specifications as published by the maker. See the sources below.

Overview

VR300DH3 is the KOKUSAI ELECTRIC group's fully automatic system for measuring resistivity and sheet resistance by the 4-point probe method. It has an automatic transfer system for 200 mm wafers.

A probe drive control system accurately measures the resistivity and sheet resistance of conductive samples such as silicon wafers and thin magnetic sheets. It supports measurement of ultra-thin films and ultra-shallow ion-implanted layers, and a measurement range for low-resistance samples is available as an option.

It offers recipe-based setup, high throughput, 1 open-cassette load port, automatic conditioning of probe tips (optional), and contour and 3D map plotting of resistivity distribution, and its operating screen complies with SEMI E95. It is used for material evaluation of silicon and polysilicon and for process control of ion implantation, diffusion and metal films.

Key features

• Fully automatic 4-point probe measurement, 200 mm automatic transfer
• Accurate measurement with probe drive control
• Supports ultra-thin films and ultra-shallow implanted layers
• Contour and 3D map plotting, SEMI E95-compliant screens

Applications

• Process control of ion implantation, diffusion and metal films
• Material evaluation of silicon and polysilicon

Other sheet resistance measurement

• RT-3000 / RG-2000 · Napson

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Sources

1. KOKUSAI ELECTRIC: VR300DH3 product page

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