FE-5000 series

Specifications

Specifications as published by the maker. See the sources below.

Overview

The FE-5000 series is Otsuka Electronics' spectroscopic ellipsometer. It uses the rotating analyzer method, with optional polarizer drive and automatic insertion and removal of a retarder plate. The wavelength range is 300 to 800 nm, from ultraviolet to visible.

Multi-channel spectroscopy with 400 or more channels measures ellipsometric spectra quickly. Because the reflection angle can be changed, films can be studied in detail. It also has an optical constant database and recipe registration.

Measurement accuracy of tanψ and cosΔ is ±0.01 or better for each, thickness repeatability is 0.01% or less on standard SiO₂, and measurable film thickness is 0.1 nm to 1 µm. It is used to evaluate semiconductor wafers with gate oxide and nitride films, compound semiconductors, alignment films for FPDs, optical coatings, DLC and more, and can also analyze ultra-thin films with unknown optical constants.

Key features

• Rotating analyzer method, wavelength 300 to 800 nm
• Multi-channel spectroscopy with 400 or more channels
• Thickness repeatability of 0.01% or less, measurable thickness 0.1 nm to 1 µm
• Variable reflection angle and optical constant database

Applications

• Thickness evaluation of gate oxide and nitride films
• Evaluation of compound semiconductors, FPDs and optical coatings

Other ellipsometers

• UVISEL Plus · HORIBA
• RE-3500 · SCREEN Holdings

All ellipsometers and Japanese suppliers

More from Otsuka Electronics

• FE-300F film thickness monitor · Process monitors (EPD/OES)

Sources

1. Otsuka Electronics: FE-5000 product page

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