Ellipsometers
Ellipsometers measure film thickness and optical constants from the change in polarization of light reflected from the sample. Spectroscopic ellipsometers measure across many wavelengths and can handle very thin films and multilayer stacks.
What it does
They are used to measure gate dielectrics, thin films in development and films on compound semiconductors and displays.
Products (3)
- UVISEL Plus · HORIBA
A phase-modulated spectroscopic ellipsometer that modulates polarization with a photoelastic modulator and no mechanical movement.
- FE-5000 series · Otsuka Electronics
Otsuka Electronics' spectroscopic ellipsometer with an automatic variable measurement angle. Automatic insertion and removal of a retarder improves accuracy.
- RE-3500 · SCREEN Holdings
A film thickness measurement system that measures tiny 40 µm square areas with a spectroscopic ellipsometer. Twice the throughput of the previous model.
Japanese makers in this category
- HORIBA · 1 product(s) listed
- Otsuka Electronics · 1 product(s) listed
- SCREEN Holdings · 1 product(s) listed
Other front-end equipment
Sources
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Last updated: October 23, 2026