UVISEL Plus
A phase-modulated spectroscopic ellipsometer that modulates polarization with a photoelastic modulator and no mechanical movement.
Maker: HORIBA · Official product page
Specifications
| Measurement method | Phase-modulated spectroscopic ellipsometry |
|---|---|
| Wavelength range | 190 to 2,100 nm |
| Key feature | Variable incidence angle of 40 to 90°, 50 µm micro-spot, full spectrum in 3 minutes (FastAcq) |
| Main applications | Measuring thickness and optical constants of thin films |
Specifications as published by the maker. See the sources below.
Overview
UVISEL Plus is HORIBA's spectroscopic ellipsometer. It determines the thickness and optical constants of thin films by measuring changes in the polarization state, and its wide wavelength range of 190 to 2,100 nm, from far ultraviolet to near infrared, is a key strength.
Using phase modulation technology, it measures polarization changes at a high frequency of 50 kHz with no mechanical moving parts. It is more accurate than rotating-element ellipsometers, with measurement accuracy of Ψ = 45° ± 0.01° and Δ = 0° ± 0.01°. Data are acquired in as little as 50 ms per point, and films from 1 Å to 50 µm can be measured.
It can evaluate film thickness and optical constants (n, k), surface and interface roughness, absorption coefficient and band gap, Mueller matrix and depolarization. Its modular design supports tabletop use as well as in-situ installation on process chambers and roll-to-roll systems, and it is used in semiconductors, flat panel displays, solar cells and materials research.
Key features
- Wavelength range of 190 to 2,100 nm (FUV to NIR)
- Phase modulation (50 kHz, no moving parts)
- Film thicknesses from 1 Å to 50 µm
- Modular design that can also be installed for in-situ measurement
Applications
- Evaluating thickness and optical constants of thin films
- R&D for semiconductors, FPDs and solar cells
Other ellipsometers
- FE-5000 series · Otsuka Electronics
- RE-3500 · SCREEN Holdings
More from HORIBA
- CRITERION D500 · Mass flow controllers (MFC)
- LabRAM Odyssey Semiconductor · Organic analysis instruments
Sources
Ellipsometers
Last updated: October 23, 2026